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BibTeX record journals/mr/TinocoER03
@article{DBLP:journals/mr/TinocoER03, author = {Julio C. Tinoco and Magali Estrada and G. Romero}, title = {Room temperature plasma oxidation mechanism to obtain ultrathin silicon oxide and titanium oxide layers}, journal = {Microelectron. Reliab.}, volume = {43}, number = {6}, pages = {895--903}, year = {2003}, url = {https://doi.org/10.1016/S0026-2714(03)00098-2}, doi = {10.1016/S0026-2714(03)00098-2}, timestamp = {Tue, 22 Dec 2020 09:47:50 +0100}, biburl = {https://dblp.org/rec/journals/mr/TinocoER03.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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