BibTeX record journals/mr/ThangaduraiKME09

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@article{DBLP:journals/mr/ThangaduraiKME09,
  author       = {P. Thangadurai and
                  W. D. Kaplan and
                  V. Mikhelashvili and
                  Gadi Eisenstein},
  title        = {The influence of electron-beam irradiation on electrical characteristics
                  of metal-insulator-semiconductor capacitors based on a high-k dielectric
                  stack of HfTiSiO(N) and HfTiO(N) layers},
  journal      = {Microelectron. Reliab.},
  volume       = {49},
  number       = {7},
  pages        = {716--720},
  year         = {2009},
  url          = {https://doi.org/10.1016/j.microrel.2009.04.003},
  doi          = {10.1016/J.MICROREL.2009.04.003},
  timestamp    = {Mon, 28 Aug 2023 21:43:14 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/ThangaduraiKME09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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