BibTeX record journals/mr/MaFUTM16

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@article{DBLP:journals/mr/MaFUTM16,
  author       = {J. Ma and
                  Y. Fujimura and
                  M. Utsumi and
                  S. Tomonaga and
                  Yoji Mashiko},
  title        = {Study on non-contact current path formation using charged particle
                  beams},
  journal      = {Microelectron. Reliab.},
  volume       = {64},
  pages        = {326--329},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.07.089},
  doi          = {10.1016/J.MICROREL.2016.07.089},
  timestamp    = {Wed, 23 Mar 2022 09:35:32 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/MaFUTM16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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