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BibTeX record journals/mr/EichenseerPM15
@article{DBLP:journals/mr/EichenseerPM15, author = {Christoph Eichenseer and Gerhard P{\"{o}}ppel and Thomas Mikolajick}, title = {Energy monitoring of high dose ion implantation in semiconductors via photocurrent measurement}, journal = {Microelectron. Reliab.}, volume = {55}, number = {9-10}, pages = {1369--1372}, year = {2015}, url = {https://doi.org/10.1016/j.microrel.2015.06.001}, doi = {10.1016/J.MICROREL.2015.06.001}, timestamp = {Sat, 22 Feb 2020 19:28:47 +0100}, biburl = {https://dblp.org/rec/journals/mr/EichenseerPM15.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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