BibTeX record journals/mr/EichenseerPM15

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@article{DBLP:journals/mr/EichenseerPM15,
  author       = {Christoph Eichenseer and
                  Gerhard P{\"{o}}ppel and
                  Thomas Mikolajick},
  title        = {Energy monitoring of high dose ion implantation in semiconductors
                  via photocurrent measurement},
  journal      = {Microelectron. Reliab.},
  volume       = {55},
  number       = {9-10},
  pages        = {1369--1372},
  year         = {2015},
  url          = {https://doi.org/10.1016/j.microrel.2015.06.001},
  doi          = {10.1016/J.MICROREL.2015.06.001},
  timestamp    = {Sat, 22 Feb 2020 19:28:47 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/EichenseerPM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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