BibTeX record journals/mr/CuetoACTBFB07

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@article{DBLP:journals/mr/CuetoACTBFB07,
  author       = {Olga Cueto and
                  Myriam Assous and
                  Fran{\c{c}}ois de Crecy and
                  A. Toffoli and
                  David Bouchu and
                  M. Fayolle and
                  Fr{\'{e}}d{\'{e}}ric Boulanger},
  title        = {Development of a permittivity extraction method for ultra low k dielectrics
                  integrated in advanced interconnects},
  journal      = {Microelectron. Reliab.},
  volume       = {47},
  number       = {4-5},
  pages        = {769--772},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.microrel.2007.01.057},
  doi          = {10.1016/J.MICROREL.2007.01.057},
  timestamp    = {Fri, 04 Nov 2022 09:06:23 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CuetoACTBFB07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}