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BibTeX record journals/mr/CantinGP09
@article{DBLP:journals/mr/CantinGP09, author = {C. Cantin and G. Gove and G. Polisski}, title = {Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring}, journal = {Microelectron. Reliab.}, volume = {49}, number = {2}, pages = {215--220}, year = {2009}, url = {https://doi.org/10.1016/j.microrel.2008.10.015}, doi = {10.1016/J.MICROREL.2008.10.015}, timestamp = {Sat, 22 Feb 2020 19:28:48 +0100}, biburl = {https://dblp.org/rec/journals/mr/CantinGP09.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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