BibTeX record journals/mr/AllersBBGKL09

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@article{DBLP:journals/mr/AllersBBGKL09,
  author    = {K.{-}H. Allers and
               Josef B{\"{o}}ck and
               S. Boguth and
               K. Goller and
               Herbert Knapp and
               Rudolf Lachner},
  title     = {Dielectric thinning model applied to metal insulator metal capacitors
               with Al\({}_{\mbox{2}}\)O\({}_{\mbox{3}}\) dielectric},
  journal   = {Microelectron. Reliab.},
  volume    = {49},
  number    = {12},
  pages     = {1520--1528},
  year      = {2009},
  url       = {https://doi.org/10.1016/j.microrel.2009.07.027},
  doi       = {10.1016/j.microrel.2009.07.027},
  timestamp = {Sat, 22 Feb 2020 19:27:26 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/AllersBBGKL09.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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