BibTeX record journals/micromachines/FukushimaKIKKMBLTK11

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@article{DBLP:journals/micromachines/FukushimaKIKKMBLTK11,
  author    = {Takafumi Fukushima and
               Takayuki Konno and
               Eiji Iwata and
               Risato Kobayashi and
               Toshiya Kojima and
               Mariappan Murugesan and
               Ji Chel Bea and
               Kang Wook Lee and
               Tetsu Tanaka and
               Mitsumasa Koyanagi},
  title     = {Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision
               Alignment and Direct Bonding without Thermal Compression for Hetero
               Integration},
  journal   = {Micromachines},
  volume    = {2},
  number    = {1},
  pages     = {49--68},
  year      = {2011},
  url       = {https://doi.org/10.3390/mi2010049},
  doi       = {10.3390/mi2010049},
  timestamp = {Tue, 14 Aug 2018 11:56:08 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/micromachines/FukushimaKIKKMBLTK11},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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