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BibTeX record journals/jsce/LuYZWZY18
@article{DBLP:journals/jsce/LuYZWZY18, author = {Sen Lu and Kaiming Yang and Yu Zhu and Leijie Wang and Ming Zhang and Jin Yang}, title = {Yaw error correction of ultra-precision stage for scanning beam interference lithography systems}, journal = {J. Syst. Control. Eng.}, volume = {232}, number = {7}, pages = {869--878}, year = {2018}, url = {https://doi.org/10.1177/0959651818766197}, doi = {10.1177/0959651818766197}, timestamp = {Fri, 18 Sep 2020 11:17:59 +0200}, biburl = {https://dblp.org/rec/journals/jsce/LuYZWZY18.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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