BibTeX record journals/jsce/LuYZWZY18

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@article{DBLP:journals/jsce/LuYZWZY18,
  author       = {Sen Lu and
                  Kaiming Yang and
                  Yu Zhu and
                  Leijie Wang and
                  Ming Zhang and
                  Jin Yang},
  title        = {Yaw error correction of ultra-precision stage for scanning beam interference
                  lithography systems},
  journal      = {J. Syst. Control. Eng.},
  volume       = {232},
  number       = {7},
  pages        = {869--878},
  year         = {2018},
  url          = {https://doi.org/10.1177/0959651818766197},
  doi          = {10.1177/0959651818766197},
  timestamp    = {Fri, 18 Sep 2020 11:17:59 +0200},
  biburl       = {https://dblp.org/rec/journals/jsce/LuYZWZY18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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