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BibTeX record journals/ijmtm/WangSC05
@article{DBLP:journals/ijmtm/WangSC05, author = {Changxue Wang and Peter Sherman and Abhijit Chandra}, title = {Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation}, journal = {Int. J. Manuf. Technol. Manag.}, volume = {7}, number = {5/6}, pages = {504--529}, year = {2005}, url = {https://doi.org/10.1504/IJMTM.2005.007700}, doi = {10.1504/IJMTM.2005.007700}, timestamp = {Thu, 04 Jun 2020 19:36:36 +0200}, biburl = {https://dblp.org/rec/journals/ijmtm/WangSC05.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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