BibTeX record journals/ijmtm/WangSC05

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@article{DBLP:journals/ijmtm/WangSC05,
  author       = {Changxue Wang and
                  Peter Sherman and
                  Abhijit Chandra},
  title        = {Modelling and analysis of pad surface topography and slurry particle
                  size distribution effects on material removal rate in chemical mechanical
                  planarisation},
  journal      = {Int. J. Manuf. Technol. Manag.},
  volume       = {7},
  number       = {5/6},
  pages        = {504--529},
  year         = {2005},
  url          = {https://doi.org/10.1504/IJMTM.2005.007700},
  doi          = {10.1504/IJMTM.2005.007700},
  timestamp    = {Thu, 04 Jun 2020 19:36:36 +0200},
  biburl       = {https://dblp.org/rec/journals/ijmtm/WangSC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}