BibTeX record journals/ieicet/NasunoMKMSTTWK05

download as .bib file

@article{DBLP:journals/ieicet/NasunoMKMSTTWK05,
  author       = {Takashi Nasuno and
                  Yoshihisa Matsubara and
                  Hiromasa Kobayashi and
                  Akiyuki Minami and
                  Eiichi Soda and
                  Hiroshi Tsuda and
                  Koichiro Tsujita and
                  Wataru Wakamiya and
                  Nobuyoshi Kobayashi},
  title        = {Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing
                  {OPC} Using Inner and Outer via Chain Dummy Patterns},
  journal      = {{IEICE} Trans. Electron.},
  volume       = {88-C},
  number       = {5},
  pages        = {796--803},
  year         = {2005},
  url          = {https://doi.org/10.1093/ietele/e88-c.5.796},
  doi          = {10.1093/IETELE/E88-C.5.796},
  timestamp    = {Sat, 11 Apr 2020 14:49:05 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicet/NasunoMKMSTTWK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.