BibTeX record journals/ieicet/IkenoMKIIA13

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@article{DBLP:journals/ieicet/IkenoMKIIA13,
  author       = {Rimon Ikeno and
                  Takashi Maruyama and
                  Satoshi Komatsu and
                  Tetsuya Iizuka and
                  Makoto Ikeda and
                  Kunihiro Asada},
  title        = {High-Throughput Electron Beam Direct Writing of {VIA} Layers by Character
                  Projection with One-Dimensional {VIA} Characters},
  journal      = {{IEICE} Trans. Fundam. Electron. Commun. Comput. Sci.},
  volume       = {96-A},
  number       = {12},
  pages        = {2458--2466},
  year         = {2013},
  url          = {https://doi.org/10.1587/transfun.E96.A.2458},
  doi          = {10.1587/TRANSFUN.E96.A.2458},
  timestamp    = {Sat, 11 Apr 2020 13:29:30 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicet/IkenoMKIIA13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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