BibTeX record journals/ibmrd/StifflerRHZMRML18

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@article{DBLP:journals/ibmrd/StifflerRHZMRML18,
  author       = {Scott R. Stiffler and
                  Ravikumar Ramachandran and
                  W. Kirklen Henson and
                  Noah Zamdmer and
                  Kevin McStay and
                  Giuseppe La Rosa and
                  Kevin M. Boyd and
                  Sungjae Lee and
                  Claude Ortolland and
                  Paul C. Parries},
  title        = {Process technology for {IBM} 14-nm processor designs featuring silicon-on-insulator
                  FinFETs},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {62},
  number       = {2/3},
  pages        = {11:1--11:7},
  year         = {2018},
  url          = {https://doi.org/10.1147/JRD.2018.2800518},
  doi          = {10.1147/JRD.2018.2800518},
  timestamp    = {Wed, 20 Apr 2022 08:45:39 +0200},
  biburl       = {https://dblp.org/rec/journals/ibmrd/StifflerRHZMRML18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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