BibTeX record journals/ibmrd/RubloffB92

download as .bib file

@article{DBLP:journals/ibmrd/RubloffB92,
  author       = {Gary W. Rubloff and
                  Don T. Bordonaro},
  title        = {Integrated processing for microelectronics science and technology},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {36},
  number       = {2},
  pages        = {233--276},
  year         = {1992},
  url          = {https://doi.org/10.1147/rd.362.0233},
  doi          = {10.1147/RD.362.0233},
  timestamp    = {Fri, 13 Mar 2020 10:54:11 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/RubloffB92.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics