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BibTeX record journals/ibmrd/RubloffB92
@article{DBLP:journals/ibmrd/RubloffB92, author = {Gary W. Rubloff and Don T. Bordonaro}, title = {Integrated processing for microelectronics science and technology}, journal = {{IBM} J. Res. Dev.}, volume = {36}, number = {2}, pages = {233--276}, year = {1992}, url = {https://doi.org/10.1147/rd.362.0233}, doi = {10.1147/RD.362.0233}, timestamp = {Fri, 13 Mar 2020 10:54:11 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/RubloffB92.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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