BibTeX record journals/ibmrd/KennedyO65

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@article{DBLP:journals/ibmrd/KennedyO65,
  author       = {David P. Kennedy and
                  Redmond R. O'Brien},
  title        = {Analysis of the Impurity Atom Distribution Near the Diffusion Mask
                  for a Planar p-n Junction},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {9},
  number       = {3},
  pages        = {179--186},
  year         = {1965},
  url          = {https://doi.org/10.1147/rd.93.0179},
  doi          = {10.1147/RD.93.0179},
  timestamp    = {Fri, 13 Mar 2020 10:55:05 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/KennedyO65.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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