BibTeX record conf/nems/XieSY13

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@inproceedings{DBLP:conf/nems/XieSY13,
  author       = {Jianbing Xie and
                  Meng Song and
                  Weizheng Yuan},
  title        = {A high sensitivity micromachined accelerometer with an enhanced inertial
                  mass {SOI} {MEMS} process},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {336--339},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559745},
  doi          = {10.1109/NEMS.2013.6559745},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XieSY13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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