BibTeX record conf/nems/HeYRBMF13

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@inproceedings{DBLP:conf/nems/HeYRBMF13,
  author       = {Tina He and
                  Rui Yang and
                  Srihari Rajgopal and
                  Swarup Bhunia and
                  Mehran Mehregany and
                  Philip X.{-}L. Feng},
  title        = {Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {554--557},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559791},
  doi          = {10.1109/NEMS.2013.6559791},
  timestamp    = {Tue, 07 May 2024 20:05:59 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HeYRBMF13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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