BibTeX record conf/icmens/SamsonAKWOB05

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@inproceedings{DBLP:conf/icmens/SamsonAKWOB05,
  author       = {Scott Samson and
                  Rahul Agarwal and
                  Sunny Kedia and
                  Weidong Wang and
                  Shinzo Onishi and
                  John Bumgarner},
  title        = {Fabrication Processes for Packaged Optical {MEMS} Devices},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {113--120},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.50},
  doi          = {10.1109/ICMENS.2005.50},
  timestamp    = {Fri, 24 Mar 2023 00:03:40 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SamsonAKWOB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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