BibTeX record conf/icmens/MizunoFDGISSIS05

• > Home > conf/icmens/MizunoFDGISSIS05

@inproceedings{DBLP:conf/icmens/MizunoFDGISSIS05,
  author       = {Jun Mizuno and
                  Sharon Farrens and
                  Viorel Dragoi and
                  Thomas Glinsner and
                  Hiroyuki Ishida and
                  Hidetoshi Shinohara and
                  Takafumi Suzuki and
                  Masanori Ishizuka and
                  Shuichi Shoji},
  title        = {Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation
                  Bonding},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {346--352},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.37},
  doi          = {10.1109/ICMENS.2005.37},
  timestamp    = {Fri, 24 Mar 2023 00:03:40 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MizunoFDGISSIS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}