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BibTeX record conf/icmens/AbersonCWHF03
@inproceedings{DBLP:conf/icmens/AbersonCWHF03, author = {Jim Aberson and Pierre Cusin and James Wylde and Ryan Hickey and Heiko Fetti}, title = {Novel Backend Singulation Techniques to Enable Commercialization of Optical {MEMS}}, booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems {(ICMENS} 2003), 20-23 July 2003, Banff, Alberta, Canada}, pages = {131}, publisher = {{IEEE} Computer Society}, year = {2003}, url = {https://doi.org/10.1109/ICMENS.2003.1221980}, doi = {10.1109/ICMENS.2003.1221980}, timestamp = {Fri, 24 Mar 2023 00:03:40 +0100}, biburl = {https://dblp.org/rec/conf/icmens/AbersonCWHF03.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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