BibTeX record conf/icinco/MaMR07

download as .bib file

@inproceedings{DBLP:conf/icinco/MaMR07,
  author       = {Beibei Ma and
                  Se{\'{a}}n F. McLoone and
                  John V. Ringwood},
  editor       = {Janan Zaytoon and
                  Jean{-}Louis Ferrier and
                  Juan Andrade{-}Cetto and
                  Joaquim Filipe},
  title        = {Tracking plasma etch process variations using principal component
                  analysis of oes data},
  booktitle    = {{ICINCO} 2007, Proceedings of the Fourth International Conference
                  on Informatics in Control, Automation and Robotics, Signal Processing,
                  Systems Modeling and Control, Angers, France, May 9-12, 2007},
  pages        = {361--364},
  publisher    = {{INSTICC} Press},
  year         = {2007},
  timestamp    = {Fri, 23 Mar 2018 15:56:51 +0100},
  biburl       = {https://dblp.org/rec/conf/icinco/MaMR07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.