BibTeX record conf/icicdt/WeinreichSPRWTN14

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@inproceedings{DBLP:conf/icicdt/WeinreichSPRWTN14,
  author    = {Wenke Weinreich and
               Konrad Seidel and
               Patrick Polakowski and
               Stefan Riedel and
               Lutz Wilde and
               Dina H. Triyoso and
               Mark G. Nolan},
  title     = {{ALD} ZrO2 processes for BEoL device applications},
  booktitle = {2014 {IEEE} International Conference on {IC} Design {\&} Technology,
               {ICICDT} 2014, Austin, TX, USA, May 28-30, 2014},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2014},
  url       = {https://doi.org/10.1109/ICICDT.2014.6838604},
  doi       = {10.1109/ICICDT.2014.6838604},
  timestamp = {Wed, 16 Oct 2019 14:14:54 +0200},
  biburl    = {https://dblp.org/rec/conf/icicdt/WeinreichSPRWTN14.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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