BibTeX record conf/icicdt/WeinreichSPDGNC16

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@inproceedings{DBLP:conf/icicdt/WeinreichSPDGNC16,
  author    = {Wenke Weinreich and
               Konrad Seidel and
               Patrick Polakowski and
               Maximilian Drescher and
               A. Gummenscheimer and
               Mark G. Nolan and
               L. Cheng and
               D. H. Triyoso},
  title     = {La-doped ZrO2 based BEoL decoupling capacitors},
  booktitle = {International Conference on {IC} Design and Technology, {ICICDT} 2016,
               Ho Chi Minh, Vietnam, June 27-29, 2016},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2016},
  url       = {https://doi.org/10.1109/ICICDT.2016.7542062},
  doi       = {10.1109/ICICDT.2016.7542062},
  timestamp = {Thu, 09 Jul 2020 09:13:44 +0200},
  biburl    = {https://dblp.org/rec/conf/icicdt/WeinreichSPDGNC16.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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