BibTeX record conf/icicdt/TriyosoWSNPUODW14

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@inproceedings{DBLP:conf/icicdt/TriyosoWSNPUODW14,
  author    = {D. H. Triyoso and
               Wenke Weinreich and
               Konrad Seidel and
               Mark G. Nolan and
               Patrick Polakowski and
               D. Utess and
               S. Ohsiek and
               K. Dittmar and
               M. Weisheit and
               M. Licbau and
               R. Fox},
  title     = {{ALD} Ta2O5 and Hf-doped Ta2O5 for {BEOL} compatible {MIM}},
  booktitle = {2014 {IEEE} International Conference on {IC} Design {\&} Technology,
               {ICICDT} 2014, Austin, TX, USA, May 28-30, 2014},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2014},
  url       = {https://doi.org/10.1109/ICICDT.2014.6838595},
  doi       = {10.1109/ICICDT.2014.6838595},
  timestamp = {Wed, 16 Oct 2019 14:14:54 +0200},
  biburl    = {https://dblp.org/rec/conf/icicdt/TriyosoWSNPUODW14.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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