BibTeX record conf/drc/RanaBRTSJPSZRKM19

download as .bib file

@inproceedings{DBLP:conf/drc/RanaBRTSJPSZRKM19,
  author    = {U. Rana and
               D. P. Brunco and
               S. Raman and
               Dina H. Triyoso and
               M. W. Stoker and
               J. B. Johnson and
               Luigi Pantisano and
               K. D. Seo and
               M. Zhao and
               A. Reznicek and
               R. Krishnan and
               B. Moser and
               J. Freeman and
               L. Jang and
               E. Kaganer},
  title     = {High Performance and Yield for Super Steep Retrograde Wells {(SSRW)}
               by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs},
  booktitle = {Device Research Conference, {DRC} 2019, Ann Arbor, MI, USA, June 23-26,
               2019},
  pages     = {251--252},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/DRC46940.2019.9046440},
  doi       = {10.1109/DRC46940.2019.9046440},
  timestamp = {Fri, 03 Apr 2020 12:14:53 +0200},
  biburl    = {https://dblp.org/rec/conf/drc/RanaBRTSJPSZRKM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
a service of Schloss Dagstuhl - Leibniz Center for Informatics