BibTeX record conf/cicc/LeeWCBAC07

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@inproceedings{DBLP:conf/cicc/LeeWCBAC07,
  author       = {Jaesik Lee and
                  Joseph Weiner and
                  Hsin{-}Hung Chen and
                  Yves Baeyens and
                  Vladimir Aksyuk and
                  Young{-}Kai Chen},
  title        = {CMOS-Based {MEMS} Mirror Driver for Maskless Lithography Systems},
  booktitle    = {Proceedings of the {IEEE} 2007 Custom Integrated Circuits Conference,
                  {CICC} 2007, DoubleTree Hotel, San Jose, California, USA, September
                  16-19, 2007},
  pages        = {401--404},
  publisher    = {{IEEE}},
  year         = {2007},
  url          = {https://doi.org/10.1109/CICC.2007.4405762},
  doi          = {10.1109/CICC.2007.4405762},
  timestamp    = {Wed, 16 Oct 2019 14:14:52 +0200},
  biburl       = {https://dblp.org/rec/conf/cicc/LeeWCBAC07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}