BibTeX record conf/cicc/IyerLSZUGGC05

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@inproceedings{DBLP:conf/cicc/IyerLSZUGGC05,
  author       = {Sitaraman V. Iyer and
                  Hasnain Lakdawala and
                  Rajarishi S. Sinha and
                  Eric J. Zacherl and
                  Richard T. Unetich and
                  Daniel M. Gaugel and
                  David F. Guillou and
                  L. Richard Carley},
  title        = {A 0.5 mm\({}^{\mbox{2}}\) integrated capacitive vibration sensor with
                  sub-10 zF/rt-Hz noise floor},
  booktitle    = {Proceedings of the {IEEE} 2005 Custom Integrated Circuits Conference,
                  {CICC} 2005, DoubleTree Hotel, San Jose, California, USA, September
                  18-21, 2005},
  pages        = {93--96},
  publisher    = {{IEEE}},
  year         = {2005},
  url          = {https://doi.org/10.1109/CICC.2005.1568616},
  doi          = {10.1109/CICC.2005.1568616},
  timestamp    = {Wed, 16 Oct 2019 14:14:52 +0200},
  biburl       = {https://dblp.org/rec/conf/cicc/IyerLSZUGGC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}