BibTeX record conf/aimech/MitaniLMH13

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@inproceedings{DBLP:conf/aimech/MitaniLMH13,
  author       = {Atsushi Mitani and
                  Hoai Phuong Le and
                  Yasutaka Matsuo and
                  Shinichi Hirai},
  title        = {Improvement of sawtooth shape generated by anisotropic etching process
                  of single-crystal silicon for microparts feeding using horizontal
                  and symmetric vibrations},
  booktitle    = {2013 {IEEE/ASME} International Conference on Advanced Intelligent
                  Mechatronics, Wollongong, Australia, July 9-12, 2013},
  pages        = {967--972},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/AIM.2013.6584219},
  doi          = {10.1109/AIM.2013.6584219},
  timestamp    = {Sat, 30 Sep 2023 09:34:03 +0200},
  biburl       = {https://dblp.org/rec/conf/aimech/MitaniLMH13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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