BibTeX record conf/3dic/PuschmannBBWFJMZGOWLZ13

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@inproceedings{DBLP:conf/3dic/PuschmannBBWFJMZGOWLZ13,
  author       = {Rene Puschmann and
                  Mathias Bottcher and
                  Irene Bartusseck and
                  Frank Windrich and
                  Conny Fiedler and
                  Peggy John and
                  Charles Alix Manier and
                  Kai Zoschke and
                  Jurgen Grafe and
                  Hermann Oppermann and
                  J{\"{u}}rgen Wolf and
                  K. Dieter Lang and
                  Michael Ziesmann},
  title        = {3D integration of standard integrated circuits},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--7},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702314},
  doi          = {10.1109/3DIC.2013.6702314},
  timestamp    = {Sat, 30 Sep 2023 09:32:44 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/PuschmannBBWFJMZGOWLZ13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}