BibTeX record conf/3dic/AlapatiTOTVCJVMFWPZSMM09

• > Home > conf/3dic/AlapatiTOTVCJVMFWPZSMM09

@inproceedings{DBLP:conf/3dic/AlapatiTOTVCJVMFWPZSMM09,
  author       = {Ramakanth Alapati and
                  Youssef Travaly and
                  Jan Van Olmen and
                  Ricardo Cotrin Teixeira and
                  Jan Vaes and
                  Marc van Cauwenbergh and
                  Anne Jourdain and
                  Greet Verbinnen and
                  Gino Marcuccilli and
                  Glenn Florence and
                  Shay Wolfling and
                  Christine Pelissier and
                  Haiping Zhang and
                  Jaydeep Sinha and
                  Andreas Machura and
                  Irfan Malik},
  title        = {{TSV} metrology and inspection challenges},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306573},
  doi          = {10.1109/3DIC.2009.5306573},
  timestamp    = {Sun, 25 Oct 2020 22:39:26 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/AlapatiTOTVCJVMFWPZSMM09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}