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G. Gove

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2000 – 2009

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2009
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C. Cantin, C. Laviron, G. Gove:
Charging control on high energy implanters: A process requirement demonstrated by plasma damage monitoring. Microelectron. Reliab. 49(2): 209-214 (2009)
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C. Cantin, G. Gove, G. Polisski:
Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring. Microelectron. Reliab. 49(2): 215-220 (2009)

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