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Mariappan Murugesan

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Hisashi Kino

> Home > Persons > Mariappan Murugesan

Publications

2023
[c27]
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  dblp key:
  - conf/3dic/ShenLHSKTMKF23
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  persistent URL:
  - https://dblp.org/rec/conf/3dic/ShenLHSKTMKF23
Jiayi Shen, Chang Liu, Tadaaki Hoshi, Atsushi Sinoda, Hisashi Kino, Tetsu Tanaka, Mariappan Murugesan, Mitsumasa Koyanagi, Takafumi Fukushima:
Impact of Super-long-throw PVD on TSV Metallization and Die-to-Wafer 3D Integration Based on Via-last. 3DIC 2023: 1-4
2021
[c26]
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  dblp key:
  - conf/3dic/FukushimaSTHBMK21
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  persistent URL:
  - https://dblp.org/rec/conf/3dic/FukushimaSTHBMK21
Takafumi Fukushima, Shinichi Sakuyama, Masatomo Takahashi, Hiroyuki Hashimoto, Jichoel Bea, Theodorus Marcello, Hisashi Kino, Tetsu Tanaka, Mitsumasa Koyanagi, Mariappan Murugesan:
Integration of Damage-less Probe Cards Using Nano-TSV Technology for Microbumped Wafer Testing. 3DIC 2021: 1-4
2019
[c24]
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  dblp key:
  - conf/3dic/LiangLMKMKFT19
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  - https://dblp.org/rec/conf/3dic/LiangLMKMKFT19
Rui Liang, Sungho Lee, Yuki Miwa, Kousei Kumahara, Mariappan Murugesan, Hisashi Kino, Takafumi Fukushima, Tetsu Tanaka:
Impacts of Deposition Temperature and Annealing Condition on Ozone-Ethylene Radical Generation-TEOS-CVD SiO2 for Low-Temperature TSV Liner Formation. 3DIC 2019: 1-4
2016
[j2]
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  dblp key:
  - journals/micromachines/FukushimaHYKMBL16
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/FukushimaHYKMBL16
Takafumi Fukushima, Hideto Hashiguchi, Hiroshi Yonekura, Hisashi Kino, Mariappan Murugesan, Ji Chel Bea, Kang Wook Lee, Tetsu Tanaka, Mitsumasa Koyanagi:
Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration. Micromachines 7(10): 184 (2016)
2009
[c2]
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  dblp key:
  - conf/3dic/BeaMONKLFTK09
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  persistent URL:
  - https://dblp.org/rec/conf/3dic/BeaMONKLFTK09
Ji Chel Bea, Mariappan Murugesan, Yuki Ohara, Akihiro Noriki, Hisashi Kino, Kang Wook Lee, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi:
Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration. 3DIC 2009: 1-5

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