Eric R. Marsh

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Publications

2007
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Eric R. Marsh, Jeremiah A. Couey, R. Ryan Vallance, Allen Y. Yi:
The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. Int. J. Manuf. Technol. Manag. 12(1/2/3): 270-283 (2007)
2005
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Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, R. Ryan Vallance:
In-process force monitoring for precision grinding semiconductor silicon wafers. Int. J. Manuf. Technol. Manag. 7(5/6): 430-440 (2005)

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