BibTeX records: Emre Ilgünsatiroglu

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@article{DBLP:journals/mr/CiappaII14,
  author       = {Mauro Ciappa and
                  Alexey Yu. Illarionov and
                  Emre Ilg{\"{u}}nsatiroglu},
  title        = {Exact 3D simulation of Scanning Electron Microscopy images of semiconductor
                  devices in the presence of electric and magnetic fields},
  journal      = {Microelectron. Reliab.},
  volume       = {54},
  number       = {9-10},
  pages        = {2081--2087},
  year         = {2014},
  url          = {https://doi.org/10.1016/j.microrel.2014.07.033},
  doi          = {10.1016/J.MICROREL.2014.07.033},
  timestamp    = {Sat, 22 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CiappaII14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

@article{DBLP:journals/mr/CiappaII14a,
  author       = {Mauro Ciappa and
                  Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov},
  title        = {Exploring the limits of scanning electron microscopy for the metrology
                  of critical dimensions of photoresist structures in the nanometer
                  range},
  journal      = {Microelectron. Reliab.},
  volume       = {54},
  number       = {9-10},
  pages        = {2123--2127},
  year         = {2014},
  url          = {https://doi.org/10.1016/j.microrel.2014.07.041},
  doi          = {10.1016/J.MICROREL.2014.07.041},
  timestamp    = {Sat, 22 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CiappaII14a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

@inproceedings{DBLP:conf/essderc/CiappaIIFS14,
  author       = {Mauro Ciappa and
                  Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov and
                  F. Filosomi and
                  C. Santini},
  title        = {Monte Carlo modeling of the extraction of roughness parameters at
                  nanometer scale by Critical Dimension Scanning Electron Microscopy},
  booktitle    = {44th European Solid State Device Research Conference, {ESSDERC} 2014,
                  Venice Lido, Italy, September 22-26, 2014},
  pages        = {357--360},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/ESSDERC.2014.6948834},
  doi          = {10.1109/ESSDERC.2014.6948834},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/CiappaIIFS14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

@article{DBLP:journals/mr/IlgunsatirogluIC13,
  author       = {Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov and
                  Mauro Ciappa},
  title        = {Unstructured tetrahedric meshes for the description of complex three-dimensional
                  sample geometries in Monte Carlo simulation of scanning electron microscopy
                  images for metrology applications},
  journal      = {Microelectron. Reliab.},
  volume       = {53},
  number       = {9-11},
  pages        = {1381--1386},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.microrel.2013.07.131},
  doi          = {10.1016/J.MICROREL.2013.07.131},
  timestamp    = {Sat, 22 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/IlgunsatirogluIC13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

@article{DBLP:journals/mr/CiappaII12,
  author       = {Mauro Ciappa and
                  Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov},
  title        = {Monte Carlo simulation of emission site, angular and energy distributions
                  of secondary electrons in silicon at low beam energies},
  journal      = {Microelectron. Reliab.},
  volume       = {52},
  number       = {9-10},
  pages        = {2139--2143},
  year         = {2012},
  url          = {https://doi.org/10.1016/j.microrel.2012.06.091},
  doi          = {10.1016/J.MICROREL.2012.06.091},
  timestamp    = {Sat, 22 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CiappaII12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}