BibTeX record journals/mr/FengTWSAK16

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@article{DBLP:journals/mr/FengTWSAK16,
  author       = {Wei Feng and
                  Tung Thanh Bui and
                  Naoya Watanabe and
                  Haruo Shimamoto and
                  Masahiro Aoyagi and
                  Katsuya Kikuchi},
  title        = {Fabrication and stress analysis of annular-trench-isolated {TSV}},
  journal      = {Microelectron. Reliab.},
  volume       = {63},
  pages        = {142--147},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.05.002},
  doi          = {10.1016/J.MICROREL.2016.05.002},
  timestamp    = {Tue, 05 Sep 2023 17:29:05 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/FengTWSAK16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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