BibTeX record journals/micromachines/FukushimaHYKMBL16

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@article{DBLP:journals/micromachines/FukushimaHYKMBL16,
  author       = {Takafumi Fukushima and
                  Hideto Hashiguchi and
                  Hiroshi Yonekura and
                  Hisashi Kino and
                  Mariappan Murugesan and
                  Ji Chel Bea and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary
                  Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration},
  journal      = {Micromachines},
  volume       = {7},
  number       = {10},
  pages        = {184},
  year         = {2016},
  url          = {https://doi.org/10.3390/mi7100184},
  doi          = {10.3390/MI7100184},
  timestamp    = {Thu, 14 Oct 2021 09:18:45 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/FukushimaHYKMBL16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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