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BibTeX record journals/corr/abs-0805-0919
@article{DBLP:journals/corr/abs-0805-0919, author = {Mathieu Puech and Jean{-}Marc Thevenoud and J. M. Gruffat and N. Launay and N. Arnal and P. Godinat}, title = {Fabrication of 3D Packaging {TSV} using {DRIE}}, journal = {CoRR}, volume = {abs/0805.0919}, year = {2008}, url = {http://arxiv.org/abs/0805.0919}, eprinttype = {arXiv}, eprint = {0805.0919}, timestamp = {Thu, 09 Nov 2023 21:13:05 +0100}, biburl = {https://dblp.org/rec/journals/corr/abs-0805-0919.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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