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Beibei Ma

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Seán F. McLoone

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2007
[c1]
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Beibei Ma, Seán F. McLoone, John V. Ringwood:
Tracking plasma etch process variations using principal component analysis of oes data. ICINCO-SPSMC 2007: 361-364

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